Temporary bridge for micro machined structures
US6458513B1 · kind B1 · utility
2Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 1999 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Sep 27, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/036
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro machined structure includes one or more temporary bridges for temporarily coupling the micro machined structure to a support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.