Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
US6459088B1 · kind B1 · utility
43Cited by
18References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1999 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Jul 14, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A drive stage comprises a support body, a plurality of movable parts movably supported relative to the support body, and an actuator for driving the plurality of movable parts to move. The plurality of movable parts are driven by the actuator to move in directions selected to mutually offset the inertial forces generated in the respective movable parts. The drive stage is suitably used as incorporated into a scanning probe microscope or an information recording/reproducing apparatus for driving a probe or a mechanical stage supporting a specimen or a recording medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.