6 degree-of-freedom (DOF) motion measuring apparatus
US6459092B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 9, 2001 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | May 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A 6 degree-of-freedom (DOF) motion measuring apparatus using a multidirectional reflector, and a swing arm type optical system using the 6-DOF motion measuring apparatus to measure the 6-DOF motion of a slider in a hard disc drive (HDD) are provided. The 6-DOF motion measuring apparatus includes: a multidirectional reflector having at least three reflecting sides by which the laser beam is slit and reflected in three directions, the multidirectional reflector being provided to the object whose motion is to be measured; three position-sensitive detectors for receiving three sub-laser beams reflected from the multidirectional reflector; and a controller for calculating the 6-DOF motion of the multidirectional reflector using the intensity distributions of the three sub-laser beams received by the three position sensitive detectors assuming that the laser beam before reflection has a Gaussian intensity distribution. The 6-DOF motion of an object can be easily and precisely measured using the multidirectional reflector having three reflecting sides. The 6-DOF motion measuring apparatus can be applied to measure the displacement of a small object moving at high speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.