Scanning optical apparatus
US6459484B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 20, 2000 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Mar 29, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning optical apparatus includes a light source unit, an objective lens, a scanning device, an imaging optical system, a confocal aperture, a plurality of photodetectors, a spectrum decomposing element, and a light-deflecting microelement array. The light source unit is located at the position where illumination light from the light source unit is incident through the light-deflecting microelement array on the confocal aperture. Each of light-deflecting microelements constituting the light-deflecting microelement array has deflection angles for selectively deflecting light passing through the confocal aperture toward the plurality of photodetectors and a deflection angle for deflecting the light from the light source unit toward the confocal aperture so that each of the light-deflecting microelements is capable of selecting one of these deflection angles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.