Turbomolecular pump
US6461123B1 · kind B1 · utility
9Cited by
14References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 2000 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Oct 24, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/644
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular pump including a plurality of separate one-piece stator elements, with each stator element including a respective housing part of a cylindrical housing of the pump, a stator disc, and a spacer disc that determines spacing between adjacent stator discs, and a plurality of rotor discs arranged in the pump housing and alternating with the stator disc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.