X-ray image detector and a method for fabricating the same
US6462344B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2000 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Mar 24, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/481
Abstract
An X-ray image detector includes a photoelectric conversion part providing electric charges in accordance with the received amount of light; a charge storage part (storage capacitor) having a first storage electrode, a dielectric layer deposited on the first storage electrode, a second storage electrode on the dielectric layer and a pixel electrode in contact with total surface of the second storage electrode and collecting electric charges produced in the photoelectric conversion part; and a switching part controlling release of the electric charges stored in the storage capacitor and a method for fabricating the same. The x-ray image detector has a reduced “off” electric current due to a reduced leakage current of the TFT, and the capacity of storage capacitor is increased. Also, the X-ray image detector may be manufactured with a higher yield, due to reduced electrical shorts between the first and second storage electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.