Optical switch and method of making the same
US6463190B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2000 |
| Grant date | Oct 8, 2002 |
| Priority date | — |
| Expiry date | Mar 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical switch in which a conductive silicon substrate is coated all over the surface area with a silicon film to form in parallel to the substrate surface a movable contact and elastic support portions for coupling the movable electrode and for elastically supporting its movable electrode in a manner to be displaced vertically. The surface region of the conductive silicon substrate facing the movable electrode and the elastic support portions is etched away to form therein a low-floor portion as a fixed electrode surface opposite the movable electrode in parallel thereto. A micro mirror having a vertical reflecting surface is mounted on the movable electrode portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.