Control of solid state dimensional features

US6464842B1 · kind B1 · utility

Assignee

• President and Fellows of Harvard College · US

Inventors

• Jene A. Golovchenko · Lexington, US
• Daniel Branton · Lexington, US
• Derek M. Stein · Somerville, US
• Ciaran J. McMullan · Moville, IE
• Jiali Li · Fayetteville, US

Key dates

• Filing date: Jun 22, 2000
• Grant date: Oct 15, 2002
• Expiry date: Jun 22, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N33/48721
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

There is provided controlled fabrication of a solid state structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure. A physical detection species is directed toward a designated structure location during process environment exposure of the structure, and the detection species is detected in a trajectory from traversal of the designated structure location, to indicate changing physical dimensions of the prespecified feature. The fabrication process environment is then controlled in response to the physical species detection to fabricate the structural feature. Also provided is a method for controlling a physical dimension of a structural feature or to form a feature by exposing the structure to a flux of ions at a selected structure temperature, the exposure conditions being controlled to cause formation of the feature or to cause at least one physical dimension of the feature to be changed, substantially by transport of material of the structure to the structural feature in response to the ion flux exposure.