Method of operating micromachined members coupled for relative rotation
US6467345B1 · kind B1 · utility
40Cited by
83References
71Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 3, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Mar 3, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for operating a monolithic, integrated, micromachined structure that includes a reference member and one or more dynamic members. Each dynamic member is supported from the reference member, either directly or indirectly, by torsion hinges. Supported in this way, each dynamic member exhibits a plurality of vibrational modes. Preferably, the structure is micromachined to establishes specified relationships between various pairs of vibrational modes. The method also includes applying force to each dynamic member that urges the member to rotate out of a rest position to a fixed particular angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.