Floating seal pick and place system and unit therefor
US6467824B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2001 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Jun 16, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53191
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pick and place system is provided with an actuator is responsive to the connection to an air power source to move to a pick-up position. The actuator moves a fork-type link which in turn moves a probe to compliantly move to pick up a micro device upon connection to the air power source. A replaceable precisor precisely aligns the micro device relative to the probe and a floating seal disposed around the probe and resting on the replaceable precisor seals the probe to the replaceable precisor. A system control, connectable to the electrical power source, is connected to the pneumatic and supply valves for selectively, electrically actuating the pneumatic and supply valves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.