Optical switching device and method
US6470108B1 · kind B1 · utility
48Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 26, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Apr 26, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of measuring with high accuracy the composition of shape memory alloy elements that are sputter deposited in thin film form. An element of known composition is polished with a flat surface. An element of unknown composition is sputter deposited onto the surface. Miniature openings are made by photography in the unknown layer, exposing an area of the known substrate. With adjacent areas of the two samples then only microns apart, accurate measurements of the compositions are made by comparing the X-ray spectra resulting from an electron beam scanning across the two areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.