Optical device, driving method of optical device and manufacture of optical device
US6470125B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Feb 22, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device assures high speed drive, excellent temperature stability, low drive voltage and small crosstalk and insertion loss. The optical device includes a single crystal substrate which is used as a conductive or semiconductive lower electrode, an epitaxial buffer layer consisting of an oxide provided on the single crystal substrate, an epitaxial optical waveguide layer with an oxide ferroelectric material having an electro-optic effect which is provided on the buffer layer and which has a channel optical waveguide of which an optical path is switched when a voltage is applied to the branching portion between an optical path for incident light and an optical path for outgoing light, and a couple of upper electrodes for applying a voltage to the branching portion of the channel optical waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.