Method and apparatus for automating a microelectric manufacturing process
US6470227B1 · kind B1 · utility
62Cited by
22References
30Claims
0Family size
Inventors
Key dates
| Filing date | Dec 2, 1998 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | Dec 2, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.