Silicon oxide particles
US6471930B2 · kind B2 · utility
15Cited by
56References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2000 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | Dec 6, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method for the production of silicon oxide particles includes the pyrolysis of a molecular stream with a silicon compound precursor, an oxygen source and a radiation absorbing gas. The pyrolysis is driven by a light beam such as an infrared laser beam. The method can be used in the production of nanoscale particles including highly uniform nanoscale particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.