Fabrication of metallic microstructures by micromolding nanoparticles
US6472459B2 · kind B2 · utility
58Cited by
6References
44Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 16, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | May 4, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/893
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.