Galvano-mirror and method of making the same
US6473221B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | May 2, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1052
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.