Intelligent minienvironment
US6473668B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2001 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | Jun 4, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F11/54
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An intelligent minienvironment control system designed to optimize the minienvironment performance, improve the protection for the multi-million dollar equipment within a fab, and to improve the safety conditions for fab personnel. The intelligent minienvironment control system is comprised of a plurality of minienvironment control and monitoring systems (MCMSs), one such system being associated with each minienvironment in the fab. The MCMSs continuously monitor the environmental conditions within the minienvironments. Each of the MCMSs are linked together in a local area network to form an integrated fab-wide minienvironment management system. The management system also includes workstations linked to the network for storing historical data for, and allowing remote access to, each of the MCMSs in the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.