Process for coating amorphous carbon coating on to an x-ray target
US6475355B2 · kind B2 · utility
6Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2001 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Aug 27, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing an x-ray target by positioning an x-ray target having an alloy surface and a graphite surface in a sputtering chamber is disclosed. The x-ray target is then coated over the graphite surface with non-hydrogenated amorphous carbon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.