X-ray analyzer having an absorption current calculating section
US6476389B1 · kind B1 · utility
4Cited by
4References
24Claims
0Family size
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Key dates
| Filing date | Mar 10, 2000 |
| Grant date | Nov 5, 2002 |
| Priority date | — |
| Expiry date | Mar 10, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In quantitative analysis of an element in a specimen in which characteristic X-rays generated from the specimen upon irradiation with an electron beam are detected, absorption current values of the specimen and a reference sample are measured before the final measurement, the value of ratio between thus measured values is determined, and the absorption current value of the specimen measured at the time of final measurement is multiplied by this value of ratio, so as to calculate the irradiation current value thereof, thereby substantially monitoring the irradiation current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.