Microelectromechanical mirror and mirror array
US6480320B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 7, 2001 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Apr 26, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0062
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A freely rotatable microelectromechanical mirror and mirror array. Each mirror is connected to a plate flexibly suspended from a plurality of actuators by a plurality of plate flexures. The actuators are flexibly suspended from a support structure by a plurality of actuator flexures. The support structure is held above and electrically isolated from a reference layer by a plurality of standoff posts. The reference layer contains a plurality of actuation means such as control electrodes to move the actuators in first and second directions when actuated. Control voltages can be selectively applied to selective control electrodes to selectively move the actuators, and extend the plurality of plate flexures. The extended plate flexures create a net restoring force or torque to translate or rotate the freely movable plate. The plate and attached mirror are thereby translated or rotated about an arbitrary axis of rotation without stress.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.