Design of a variable attenuator and fabrication of its shutter element
US6480662B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 28, 2000 |
| Grant date | Nov 12, 2002 |
| Priority date | — |
| Expiry date | Jan 28, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A variable attenuator employs a shutter element that is inserted into the path of a beam of radiation. The shutter element comprises a transparent substrate with an opaque layer formed on top of the substrate. The opaque layer forms a pattern in the shape of dots on one part of the substrate and in the shape of a solid layer with holes therein on another part of the substrate. The pattern of holes and dots are such that the radiation transmission function of the element varies as a smooth linear function with the length of the shutter element. Therefore, by inserting the shutter element in a direction along its length into the path of the radiation beam, the amount of attenuation of the beam can be accurately controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.