Position sensing system and method for an inspection handling system
US6481187B1 · kind B1 · utility
8Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2000 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Apr 7, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67721
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier tape drive used in conjunction with a pick and place module. The drive advances carrier tape to a desired position in two steps. The first step includes substantially stopping a carrier tape compartment short of a loading position, and the second step includes moving the compartment into the loading position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.