Micromachined devices with anti-levitation devices
US6481284B2 · kind B2 · utility
100Cited by
27References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2001 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Dec 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device has first and second sets of interdigitating fingers movable on a plane parallel to a substrate. A first group of conductive members is formed on the substrate and is at the same DC voltage as a first group of fingers. A second group of conductive members is formed on the substrate and is electrically coupled to the second group of fingers. The conductive members help to prevent one group of fingers from levitating with respect to others.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.