Reentrant microwave resonant cavity accelerometer
US6481286B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2000 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Sep 23, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/097
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved microwave resonant cavity accelerometer includes a reentrant microwave resonant cavity. Preferably, the accelerometer includes first and second complementary reentrant microwave resonant cavities, each being characterized by a nominal resonant frequency. Each cavity includes a capacitive gap, and an inductive gap surrounding each capacitive gap. A coupler couples to each cavity a microwave signal substantially at the nominal resonant frequency of each cavity. In response to an acceleration force along a sensing axis, a proof mass positioned along the sensing axis differentially changes the dimensions of each cavity and establishes a resonant frequency for each cavity which varies as a function of the acceleration force. The accelerometer includes means for detecting electromagnetic energy in each cavity and determining the frequency of the detected energy. The shift in resonant frequency is used to determine the acceleration of the proof mass. By using-reentrant cavities, the sensitivity of the accelerometer to an acceleration of the proof mass is improved by a factor of about 100 for miniaturized proof masses. The accelerometer may be fabricated using micromachining te…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.