Method and apparatus for removing harmful components in an exhaust gas
US6482367B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 20, 2000 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Jul 20, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound. The apparatus includes a first water scrubber for washing an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from a manufacturing equipment. The apparatus further includes a gas decomposer-burner tower having a gas decomposer room connected to an upper end of the first water scrubber for mixing at least one of a hydrocarbon gas and NH3 gas with the exhaust gas washed by the first water scrubber and thermally decomposing a resulting mixed gas. The apparatus further includes a burner room, a heater below the heater in the gas decomposer room and the burner room, a grating below the heater in the gas decomposer room and the burner room. The apparatus further includes a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room, an air-feeding pipe for supplying air to the burner room, a second water scrubber connected to a lower end of the burner room, and a water cistern on which the first and second scrubbers stand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.