Acoustic consumption monitor
US6482649B1 · kind B1 · utility
4Cited by
17References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1999 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Sep 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of determining the reaction efficiency of a CVD process reactor by which a reactive gas combination entering the reactor deposits a solid reaction product as a thin film onto a substrate. The composition of the reactive gas combination is measured by an acoustic cell which is disposed downstream from the outlet port of the reactor to determine the reactor's efficiency. Determination of the reactor's efficiency allows the growth rate of the thin film to be determined as well as associated rates of the products which have been exhausted from the reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.