Container inspection system and method of using in semiconductor manufacturing
US6484113B1 · kind B1 · utility
2Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1999 |
| Grant date | Nov 19, 2002 |
| Priority date | — |
| Expiry date | Jun 3, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67294
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An automatic inspecting system for detecting the presence of and identifying whether the proper replacement container has been installed at a work station in a processing line, which automatic container checking system is capable of reading identifying information on the container, e.g., a bar-code, and comparing the information read with stored information indicative of a desired identification to determine whether there is a match. In the absence of a match, an alarm or other means can be used, by way of notification of a problem or to automatically stop the processing line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.