Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
US6486597B1 · kind B1 · utility
12Cited by
49References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 1999 |
| Grant date | Nov 26, 2002 |
| Priority date | — |
| Expiry date | Oct 21, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/939
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A diamond-like carbon-containing material useful as a coating for electronic devices including field emission devices and color television tubes, the coatings having both low secondary electron emission coefficients of less than unity and electrical resistivity tunable over a range of from about 10e−2 to about 10e16.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.