Semiconductor device testing apparatus having a contact sheet and probe for testing high frequency characteristics
US6486688B2 · kind B2 · utility
5Cited by
4References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Nov 26, 2002 |
| Priority date | — |
| Expiry date | Sep 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06772
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device testing apparatus that has a laminate structure composed of a contact sheet having a first opening, an elastic sheet having a second opening and a base plate having a third opening. A supply voltage is applied to an external terminal located on a peripheral portion of the contact sheet. A probe of a probe portion is contacted to a signal electrode of a semiconductor device through the third, second and first openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.