Cyrogenic inertial micro-electro-mechanical system (MEMS) device
US6487864B1 · kind B1 · utility
30Cited by
8References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2002 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Apr 23, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B2400/15
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cryogenic inertial Micro-Electro-Mechanical System (MEMS) device is provided. The device may include a vibratory gyroscope operable to sense a rotational acceleration. The device may also include a pre-amplifier co-located in a close proximity to the vibratory gyroscope. The device may be operated at substantially low temperatures, such as cryogenic temperatures, to reduce electrical noise and improve stability of outputs of the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.