Micromachined devices with stop members
US6487908B2 · kind B2 · utility
56Cited by
28References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2001 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Dec 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device has a first body suspended over a substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate. A driver moves the first body in the first direction. A stop member, anchored to the substrate, limits motion of the body in the plane in a direction perpendicular to the first direction, and in a direction orthogonal to the plane and away from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.