Microfabricated devices and method of manufacturing the same
US6488872B1 · kind B1 · utility
265Cited by
7References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2000 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Jan 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0035
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Microfabricated devices and methods of manufacturing the devices are disclosed. The devices are manufactured from a substrate having microscale fluid channels, and polymerizing a polymerizable mixture in the channels to form stimuli-responsive operating components of the device. The operating components can be functional or structural components. The method of manufacture obviates the traditional assembly of microscale components to form a device because the microscale components are formed in situ on or within the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.