Robot motion compensation system
US6489741B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2000 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Aug 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45056
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Motion of a substrate-transporting robot arm is controlled in order to compensate for inaccuracies and deflections encountered during operation. The compensation is effected by synchronizing elevational and planar motions of the robot arm such that the trajectory of the substrate is made coincident with the object axis of the substrate. The substrate may be a semiconductor wafer, an LCD panel or an end effector of the robot arm. The synchronized motion is achieved using a controller issuing control signals to arm actuating means based on synchronization algorithms developed during analytical or experimental robot learning sessions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.