Integrated circuit device having process parameter measuring circuit
US6489799B1 · kind B1 · utility
11Cited by
2References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 28, 2000 |
| Grant date | Dec 3, 2002 |
| Priority date | — |
| Expiry date | Apr 28, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
External connection terminals A to D of an integrated circuit are connected to each terminal of elements 1 to 5 to be measured for a process parameter using interconnections. Among the interconnections, one to connect the base of a bipolar transistor 1 and external connection terminal B for example is provided with a switch 6. A terminal of a particular element and an external connection terminal are connected by turning on of the switch 6. Thus, a process parameter of the bipolar transistor 1 is measured using the external terminals to which each terminal of the bipolar transistor is connected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.