Rotating device for plasma immersion supported treatment of substrates

US6490993B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Ronald Neidhardt · Stuttgart, DE
• Jeanne Forget · Stuttgart, DE
• Karl Kohlhof · Recklinghausen, DE
• Siegmar Schoser · Tübingen, DE

Key dates

• Filing date: Sep 9, 1999
• Grant date: Dec 10, 2002
• Expiry date: Sep 9, 2019

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/4584
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A rotary drive which is suitable in treatment of three-dimensional workpieces. In this rotary apparatus, only the removably mounted rotatable rods that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in at the lower end of the rods, while the actual drive elements for rotating the rods are electrically insulated therefrom by suitable ceramic insulating elements.