Hydroxy-epoxide thermally cured undercoat for 193 NM lithography
US6492092B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1999 |
| Grant date | Dec 10, 2002 |
| Priority date | — |
| Expiry date | Mar 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0045
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is directed to a thermally curable polymer composition comprising a hydroxyl-containing polymer and a polyfunctional epoxide as a crosslinking agent. The thermally curable polymer composition may be dissolved in a solvent and used as an undercoat layer in deep UV lithography. In addition, the present invention also relates to a photolithographic coated substrate comprising: a substrate, the thermally cured undercoat composition on the substrate, and a radiation-sensitive resist topcoat on the thermally cured undercoat composition. Furthermore, the present invention further relates to a process for using the photolithographic coated substrate for the production of relief structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.