Fluorinated solvent compositions containing hydrogen fluoride
US6492309B1 · kind B1 · utility
25Cited by
12References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2000 |
| Grant date | Dec 10, 2002 |
| Priority date | — |
| Expiry date | Apr 17, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and an optional co-solvent, and the use of these compositions for etching of microelectromechanical devices is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.