Interference detecting apparatus and tomography apparatus
US6493091B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2001 |
| Grant date | Dec 10, 2002 |
| Priority date | — |
| Expiry date | Apr 13, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4795
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Measurement of an internal structure of a sample is performed using interference of light within a short time. Through a first optical frequency comb generator 5 using a first signal having a frequency f1 and generating reference light having a sideband every interval of the frequency f1 and a second optical frequency comb generator 6 using a second signal having a frequency f2 and generating object light having a sideband every interval of the frequency f2, and sweeping of emission timing between the reference light and the object light, by changing a phase difference or frequency difference between the first signal and second signal, and detecting a change in light intensity of the interference light due to the interference, operation of detecting the interference position is made at a high speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.