Wide frequency band micromachined capacitive microphone/hydrophone and method
US6493288B2 · kind B2 · utility
23Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2000 |
| Grant date | Dec 10, 2002 |
| Priority date | — |
| Expiry date | Nov 30, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R1/44
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.