Patent · US Expired

Vertical cavity surface emitting laser with oxidized strain-compensated superlattice of group III-V semiconductor

US6493366B1 · kind B1 · utility

6Cited by
6References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 2, 2000
Grant dateDec 10, 2002
Priority date
Expiry dateMay 2, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/3425
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A vertical cavity surface emitting laser that includes a Group III-V semiconductor material substrate; a first Distributed Bragg Reflector mirror, where the first Distributed Bragg Reflector mirror includes at least seven pairs of layers, where each layer has a different index of refraction, where one of the layers is a Group III-V semiconductor material, and where the other layer is a completely oxidized at least one strain-compensated superlattice of Group III-V semiconductor material, where each at least one strain-compensated superlattice includes at least two monolayers of a Group III-V semiconductor material and at least two monolayers of an aluminum-bearing Group III-V semiconductor material; a first Group III-V semiconductor material layer; a first contact; a selectively oxidized at least one strain-compensated superlattice of Group III-V semiconductor material, where each at least one strain-compensated superlattice of Group III-V semiconductor material includes at least two monolayers of a Group III-V semiconductor material and at least two monolayers of an aluminum-bearing Group III-V semiconductor material; a second Group III-V semiconductor material layer; a second con…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.