Micro electromechanical switch for detecting acceleration or decelaration
US6494095B1 · kind B1 · utility
15Cited by
17References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 28, 2000 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Mar 28, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H35/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro electromechanical switch for detecting acceleration or deceleration includes a rectangular planar mass of, for example, etched silicon suspended on a pair of beams from an anchor located in the same silicon base. Motion in a plane of movement caused by acceleration or deceleration is detected by a pair of photodiodes and a light emitting diode located on opposite sides of the planar mass or shutter so that when the shutter moves the interruption of the light is sensed and thus acceleration or deceleration is indicated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.