Patent · US Expired

Electro-plating apparatus and method

US6495018B1 · kind B1 · utility

11Cited by
3References
29Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 15, 2000
Grant dateDec 17, 2002
Priority date
Expiry dateMar 15, 2020

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC25D21/12
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A single delivery channel is formed by, and between, inner wall 2 and baffle 3. Electrolyte 5 is pumped up the interior of channel 1 and is directed onto substrate 4 being a cathode maintained at −10 volts. The upper part of the inner wall 2 of channel 1 forms the anode such that electrote is forced between the substrate and the upper horizontal surface of the anode 6. A second baffle 7 is provided in order to assist in collecting and removing electrolyte 5 after impingement with substrate 4, possible for re-use. Contact between the electrolyte 5 and substrate 4 is optimised by providing the electrolyte with a swirling motion as it passes up channel 1. Anode 6 is a solid conducting bar 10, alternatively it is formed of solid rods 11 nor tubes 12.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.