Piezoelectric/electrostrictive element
US6495945B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2001 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Sep 6, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/3298
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A ceramic substrate 1 comprises a thin diaphragm portion 3 and a thick portion 2. A lower electrode 4 is formed on the ceramic substrate and is spaced apart from an auxiliary electrode 8, also formed on the ceramic substrate. A bonding layer 7C comprises an insulator and is formed on the ceramic substrate between the lower and auxiliary electrodes. A piezoelectric/electrostrictive layer 5 is formed on at least a portion of each of the lower electrode, the auxiliary electrode and the bonding layer. An upper electrode 6 extends over the piezoelectric/electrostrictive layer and contacts the auxiliary electrode. A bonded portion exists wherein the bonding layer serves to completely bond together the substrate and the piezoelectric/electrostrictive film layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.