Method to force-balance capacitive transducers
US6496348B2 · kind B2 · utility
Inventor
Key dates
| Filing date | May 25, 2001 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | May 25, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0392
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method to maintain a movable electrode of a variable capacitor in fixed relationship with a stationary electrode by electrostatic force feedback when one capacitor electrode is grounded. The invention exploits the high quiescent capacitance and capacitance-load sensitivity of a variable-area capacitance transducer in combination with the advantage of controlling the flexible electrode with a low voltage compared to transducers with parallel-plate capacitors. The invention can be used to accurately control the position of a surface, stylus, inertial mass, valve, electrical contact, electrical component; or an optical component such as a mirror, lens, grating, filter, or holographic element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.