Semiconductor device manufacturing apparatus and information processing system therefor
US6496747B1 · kind B1 · utility
9Cited by
9References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 12, 1999 |
| Grant date | Dec 17, 2002 |
| Priority date | — |
| Expiry date | Oct 12, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99954
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor manufacturing system for performing a predetermined process in accordance with a job file having a process content set therein. The manufacturing system includes a storage device for memorizing a job file, an accepting device for accepting a job file, a correction device for correcting, on the basis of a process content of a job file already memorized, a process content set in a job file as newly accepted, and a predicting device for predicting a time for completion of the process, on the basis of the job file as already memorized and the job file having its process content corrected by the correction device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.