Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope
US6499340B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 18, 1999 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Feb 18, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/869
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring method and apparatus of a scanning probe microscope which is easy to initially set caused by exchanging a cantilever. A cantilever is effected of Z rough movement while forcibly vibrating a sample. When a contact pressure of the cantilever against the sample becomes a predetermined magnitude, the Z rough movement is ended. The forcible vibrational frequency may be a new resonant frequency caused by contacting the cantilever with the sample, or a shift resonant frequency. Then, XY scanning is effected to measure while putting the cantilever into light contact with a sample surface. It is possible to use, as an apparatus to forcibly vibrate the cantilever, a multi-layer piezoelectric element that responds to an output signal from an oscillator for outputting a signal at a predetermined frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.