Turbomolecular pump and vacuum apparatus
US6499942B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1999 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Nov 19, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2250/70
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular pump capable of maintaining a maximum discharge rate even in a higher pressure has rotor blades or stator blades formed such that surface angles on a first surface of the blades facing the direction of rotation differ between an inlet port side of the blades and an outlet port side. The surface closer to the inlet port has a larger angle than on a side closer to the outlet port. One side of the blades has a plurality of surface portions each with different angles. The angles of the surfaces are in the range of 20° to 50° on the inlet port side, 10° to 40° on an intermediate portion, and 10° to 90° on the outlet port side. The angles of the first and second surface portions are larger than that of the intermediate surface portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.