Patent · US Expired

Apparatus for preventing misplacement of a cassette pod onto a process machine

US6500261B1 · kind B1 · utility

4Cited by

9References

9Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Jun Chen · Hsinchu, TW
Kuo-Chen Lin · Baoshan, TW
Chi-Pong Chiang · Yongkang, TW

Key dates

Filing date	Dec 21, 2001
Grant date	Dec 31, 2002
Priority date	—
Expiry date	Dec 21, 2021

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/136
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method and an apparatus for preventing the misplacement of a cassette pod on the loadport of a process machine are described. In the method, a cassette pod that is equipped with an identification tag on a front panel is first provided, a process machine that is equipped with a loadport for receiving the cassette pod is then provided, at least one position verification block is mounted on the loadport at a first preset position, and then at least one position verification finger is mounted on the front panel of the cassette pod corresponding to the first preset position of the at least one position verification block such that when the cassette pod is placed on the loadport, the at least one position verification finger does not interfere with the at least one position verification block.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.