Apparatus for rotary cathode electroplating with wireless power transfer

US6500316B1 · kind B1 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Joseph J. Fatula, Jr. · San Jose, US
• Robert Hitzfeld · San Jose, US
• Richard J. Contreras · Campbell, US
• Guillermo Prada-Silva · Wappingers Falls, US
• Andrew Chiu · San Jose, US
• Rainer Schieferstein · Saulheim, DE

Key dates

• Filing date: Nov 17, 2000
• Grant date: Dec 31, 2002
• Expiry date: Feb 14, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S204/07
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An apparatus for rotary cathode electroplating having a head assembly, a substrate/thief assembly having a thieving ring which includes a number of individually chargeable segments, and a secondary induction assembly including a secondary core and a secondary winding. A motor drives the substrate/thief assembly to rotate relative to the head assembly. A controller directs electrical charge to each of the individually chargeable segments of the thieving ring. An electrical storage device stores electrical energy which is to be supplied to the controller. A charging apparatus induces a magnetic flux which induces an alternating current in the secondary winding of the secondary induction assembly. A converter converts the induced alternating current to direct current, which is then stored on the electrical storage device.