Patent · US Expired

Method for fabricating a magneto-optic modulator

US6500498B1 · kind B1 · utility

2Cited by
0References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 16, 2000
Grant dateDec 31, 2002
Priority date
Expiry dateApr 12, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01F41/14
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method for fabricating a magneto-optic modulator, such as for use with a solid state ring resonator gyroscope. The method includes inducing a magnetic field at a substrate holder as a layer of magnetic material is being deposited on a substrate. The magnetic field helps to optimally orient the deposited magnetic material layer to improve the characteristics of the magneto-optic modulator. In addition to inducing a magnetic field, a low energy ion beam may be applied to optimize orientation. The method can be used to fabricate a magneto-optic modulator on a substrate containing a partially fabricated ring resonator without destroying previously fabricated components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.